RB100VSD1-356-150-L01L01-UNN

Description

The RB100 Series is a dedicated wafer transfer robot developed by for the semiconductor industry, featuring fully independent intellectual property rights. The RB100 offers a diverse product lineup, including single-arm, dual-arm, end-flip, and waterproof models. Equipped with Is independently designed end-effectors, it ensures reliable transfer of wafers up to 300mm in various materials and thicknesses.

performance parameter

• Suitable for wafer transfer up to 300mm

• Capable of free-end trajectory and oblique insertion

• Fully independent intellectual property rights

• Modular design with customizable options

• Compliant with SEMI S2 standards

Product Specifications

Model	RB100VSD1-356-150-L01L01-UNN
Manipulator type	Dual-arm four-Fork vacuum hand
Applicable wafer size	≤ 300mm
Wafer suction method	Lifting type
Mechanical structure	Horizontal multi-joint
Control axes	4	Controller	ECB100S-4
Motor Type	AC Direct Drive Motor
Motion range	Reaching distance from the center	Rotation angle (θ-axis)	Lifting(Z-axis)
	1327mm	360°	50/100/150mm
Repeatability accuracy	Within ±0.1mm
Control communication methods	RS232/RS485/TCP/IP
Cleanliness	ISO Standard class1
Factory Affairs	Power supply: AC220V 5A
Weight	≈ 70Kg

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RB100VSD1-356-150-L01L01-UNN

Description

performance parameter

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