EFEM product

Description

For the front-end process equipment for wafer loading and unloading supporting for various process equipment in semiconductor production process.

performance parameter

Equipment model

• AEW6000 series

Product features
• Interface with diff erent process/test equipment to realize
automatic process/test
• Diff erent Port quantity frames and connection modes
between diff erent equipment are selected according to the
production capacity and process requirements
• Flexible confi guration of LP/Robot/Fork/Aligner according
to wafer size and functional requirements
• A variety of optional functions: Such as fl ip, dual-arm highspeed transmission and walking shaft
• HMI conforming to SECS/GEM standard
• E84 module can be confi gured to handover with the OHVC
system in the factory

Get Quote

hotline: 0086+400-186-7770

Business : srt@softrobottech.com

| Beijing | Soft | Building 12, No.109 Yard, Jinghai 3rd Road, Beijing Economic-Technological Development Area, Beijing

| Suzhou | Soft | 5F, Block A, Tianrui Industrial Park, No.1528 Chenfeng Highway, Yangshe Town, Zhangjiagang City, China

| Suzhou | Intelligent | No.5 Factory, Shengda Baoluo Science & Technology Entrepreneurship Park, 1919 Fengyang Road, Weitang Town, Xiangcheng District, Suzhou

| Hangzhou｜Soft｜5A-4, Building 7, No. 11, Jugong Road, Xixing Street, Binjiang District, Hangzhou City, Zhejiang Province

| Suzhou｜Bokeshi｜Gaorong Building, High-speed Rail New Town, Xiangcheng District, Suzhou City, Jiangsu Province

| Hefei｜Sairuitan｜Shui'an Chuanggu Building, No. 1288 Ziyun Road, Economic and Technological Development Zone, Hefei City, Anhui Province

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EFEM product

Description

performance parameter

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